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直播回放 | 光斑尺寸可調的高均勻性線光斑半導體激光器系統

    
Time：2023-09-18

  

  

  
  		
  		
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2023年9月21日周四19：30，炬光科技光機系統技術專家華大成在光電匯直播平臺“光言萬物”發表題為《光斑尺寸可調的高均勻性線光斑半導體激光器系統》的專題演講。




報告摘要


晶圓激光退火（Wafer Laser Annealing）是28nm及以下邏輯芯片制造前道工序中不可缺少的關鍵工藝之一。該工藝采用近紅外波段半導體激光光源，通過多組不同功能的激光光學整形系統及光學勻化系統，在工作距離下達成12mm*70μm的極窄線激光光斑，將形成的高能量密度極窄激光光斑照射到晶圓表面，在不到1毫秒的時間內將表層原子層加熱到1000°C以上再急速冷卻，使晶(jing)圓表(biao)面(mian)局部形成超淺(qian)結和高激(ji)活結，從(cong)而有效減少(shao)前道工(gong)序(xu)中產(chan)生的晶(jing)圓電極缺陷，提高產(chan)品性能，提升晶(jing)圓生產(chan)良(liang)品率。


炬光科技推出的DLight?S系列半導體集成電路晶圓退火系統，結合產生光子的共晶鍵合技術、激光光源熱管理技術、熱應力控制技術以及調控光子的激光光束轉換技術和光場勻化技術，產生一條長寬比達160:1的近紅外波段極窄線光斑，并在光斑長度方向達到＞95%的能量均勻性和＞98%的能量穩定性。應用在半導體前道工序中的多種退火工藝。




DLight?S系(xi)列半導體集成電路晶圓退火系(xi)統


演講人信息




華大成，浙江大學光(guang)(guang)學工程碩士畢業，光(guang)(guang)機系統(tong)技術專(zhuan)家，2019年加入炬(ju)光(guang)(guang)科(ke)技，長期從(cong)事高(gao)精(jing)密線(xian)光(guang)(guang)斑激光(guang)(guang)系統(tong)開發工作。

  
    
  
  

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